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MEMS and Microsystems  (View More...)

Fabrication of Micromachined Microstructure Devices lec14 37:51 to 41:08 PDF VIDEO
Micromachined Microsensors Mechanical lec17 17:48 to 21:19 PDF VIDEO
Micromachined Micrometer for MEMS lec21 23:09 to 27:46 PDF VIDEO
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