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 Course  Lecture
  • Title: MEMS and Microsystems
  • Department: Electronics & Communication Engineering
  • Author: Prof. Santiram Kal
  • University: IIT Kharagpur
  • Type: WebLink
  • Abstract:
    not available

List of Lectures

Introduction To Mems & Microsystems
Introduction To Microsensors
Evoluation Of Mems, Microsensors, Market Survey
Application Of Mems
Mems Materials
Mems Materials Properties
Mems Materials Properties (contd.)
Microelectronic Technology For Mems - Ii
Microelectronic Technology For Mems - Iii
Micromachining Technology For Mems
Micromachining Process
Etch Stop Techniques And Microstructure
Surface And Quartz Micromachining
Fabrication Of Micromachined Microstructure
Microstereolithography
Mems Microsensors Thermal
Micromachined Microsensors Mechanical
Mems Pressure And Flow Sensor
Micromachined Flow Sensors
Mems Inertial Sensors
Micromachined Microaccelerometers For Mems
Mems Accelerometers For Avionics
Temperature Drift And Damping Analysis
Piezoresistive Accelerometer Technology
Mems Capacitive Accelerometer
Mems Capacitive Accelerometer Process
Mems Gyro Sensor
Mems For Space Application
Polymer Mems & Carbon Nano Tubes Cnt
Wafer Bonding & Packaging Of Mems
Interface Electronics For Mems
Mems For Biomedical Applications (bio-mems)
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